{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10529602","patent":{"patent_number":"US-10529602","title":"Method and apparatus for substrate fabrication","assignee":null,"inventors":[],"filing_date":"2018-11-13T00:00:00.000Z","publication_date":"2020-01-07T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"Methods and apparatuses for substrate fabrication are provided herein. The apparatus, for example, can include a cluster tool including a vacuum transfer module (VTM) configured to receive, under vacuum conditions, a silicon substrate with a polysilicon plug (poly plug) and transfer, without vacuum break, the substrate to and from a plurality of processing chambers each independently connected to the VTM for performing a corresponding one of a plurality of DRAM bit line processes on the substrate, the plurality of processing chambers comprising a pre-cleaning chamber configured to remove native oxide from a surface of the substrate, a barrier metal deposition chamber configured to deposit the barrier metal on the surface of the poly plug on the silicon substrate, a barrier layer deposition chamber configured to deposit at least one material on the surface of the barrier metal, a bit line metal deposition chamber configured to deposit at least one material on the surface of the barrier layer, and a hard mask deposition chamber configured to deposit at least one material on the surface of the bit line metal."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and apparatus for substrate fabrication","description":"Methods and apparatuses for substrate fabrication are provided herein. The apparatus, for example, can include a cluster tool including a vacuum transfer module (VTM) configured to receive, under vacu","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10529602","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10529602","citation_suggestion":"Patentable. \"Method and apparatus for substrate fabrication\" (US-10529602). https://patentable.app/patents/US-10529602","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10529602","json":"https://patentable.app/api/llm-context/US-10529602","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:38:03.048Z"}