{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10529608","patent":{"patent_number":"US-10529608","title":"Substrate processing apparatus and substrate processing method","assignee":null,"inventors":[],"filing_date":"2017-02-23T00:00:00.000Z","publication_date":"2020-01-07T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":14,"abstract":"Disclosed is a substrate processing apparatus including: a substrate holding unit configured to hold a substrate; a processing container configured to accommodate the substrate holding unit; a cover unit configured to load the substrate holding unit therein and to open or close an opening provided in one end of the processing container; a seal member configured to seal a gap between the end of the processing container and the cover unit; a driving mechanism configured to move the cover unit; and a controller configured to control an operation of the driving mechanism. The controller controls the operation of the driving mechanism such that the cover unit performs an intermittent operation of alternately repeating moving and stopping when opening the opening in the processing container."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing apparatus and substrate processing method","description":"Disclosed is a substrate processing apparatus including: a substrate holding unit configured to hold a substrate; a processing container configured to accommodate the substrate holding unit; a cover u","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10529608","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10529608","citation_suggestion":"Patentable. \"Substrate processing apparatus and substrate processing method\" (US-10529608). https://patentable.app/patents/US-10529608","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10529608","json":"https://patentable.app/api/llm-context/US-10529608","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:07:05.569Z"}