{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10529631","patent":{"patent_number":"US-10529631","title":"Test structures and method for electrical measurement of FinFET fin height","assignee":null,"inventors":[],"filing_date":"2016-09-19T00:00:00.000Z","publication_date":"2020-01-07T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":16,"abstract":"Methods of measuring fin height electrically for devices fabricated using FinFET technology are disclosed here. One method uses an interleaving comb-like test structure with no gate. The other method extracts fin height from total gate capacitance from FinFETS with varying gate lengths. When a comb-like structure with no gate is used to measure fin height, if there is another structure with a gate is used, then the gate capacitance may be measured to independently measure thickness of gate dielectric."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Test structures and method for electrical measurement of FinFET fin height","description":"Methods of measuring fin height electrically for devices fabricated using FinFET technology are disclosed here. One method uses an interleaving comb-like test structure with no gate. The other method ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10529631","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10529631","citation_suggestion":"Patentable. \"Test structures and method for electrical measurement of FinFET fin height\" (US-10529631). https://patentable.app/patents/US-10529631","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10529631","json":"https://patentable.app/api/llm-context/US-10529631","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T15:35:47.062Z"}