{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10529633","patent":{"patent_number":"US-10529633","title":"Method of integrated circuit (IC) chip fabrication","assignee":null,"inventors":[],"filing_date":"2017-12-06T00:00:00.000Z","publication_date":"2020-01-07T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":17,"abstract":"A method of forming integrated circuit (IC) chips. After masking a layer of a material to be etched, the layer is subjected to an atomic layer etch (ALE). During the ALE, etch effluent is measured with a calorimetric probe. The calorimetric probe results reflect a species of particles resulting from etching the material. The measured etch results are checked until the results indicate the particle content is below a threshold value. When the content is below the threshold ALE is complete and IC chip fabrication continues normally."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of integrated circuit (IC) chip fabrication","description":"A method of forming integrated circuit (IC) chips. After masking a layer of a material to be etched, the layer is subjected to an atomic layer etch (ALE). During the ALE, etch effluent is measured wit","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10529633","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10529633","citation_suggestion":"Patentable. \"Method of integrated circuit (IC) chip fabrication\" (US-10529633). https://patentable.app/patents/US-10529633","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10529633","json":"https://patentable.app/api/llm-context/US-10529633","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:47:12.446Z"}