{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10530111","patent":{"patent_number":"US-10530111","title":"Apparatus for delivering gas and illumination source for generating high harmonic radiation","assignee":null,"inventors":[],"filing_date":"2018-02-23T00:00:00.000Z","publication_date":"2020-01-07T00:00:00.000Z","cpc_codes":["G01N","G01N","G02F"],"num_claims":17,"abstract":"Disclosed is gas delivery system which is suitable for a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a gas delivery element delivers gas in a first direction. The gas delivery element has an optical input and an optical input, defining an optical path running in a second direction. The first direction is arranged relative to the second direction at an angle that is not perpendicular or parallel. Also disclosed is a gas delivery element having a gas jet shaping device, or a pair of gas delivery elements, one of which delivers a second gas, such that the gas jet shaping device or second gas is operable to modify a flow profile of the gas such that the number density of the gas falls sharply."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus for delivering gas and illumination source for generating high harmonic radiation","description":"Disclosed is gas delivery system which is suitable for a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10530111","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10530111","citation_suggestion":"Patentable. \"Apparatus for delivering gas and illumination source for generating high harmonic radiation\" (US-10530111). https://patentable.app/patents/US-10530111","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10530111","json":"https://patentable.app/api/llm-context/US-10530111","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T15:37:40.628Z"}