{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10532896","patent":{"patent_number":"US-10532896","title":"Grip apparatus and substrate inspection system including the same, and method of manufacturing semiconductor device using the substrate inspection system","assignee":null,"inventors":[],"filing_date":"2018-05-29T00:00:00.000Z","publication_date":"2020-01-14T00:00:00.000Z","cpc_codes":["G01N","G01N","H01L","H01L"],"num_claims":20,"abstract":"A substrate inspection system includes a floating unit that floats a substrate, an inspection unit disposed above the floating unit, a grip unit disposed below the inspection unit and including a first grip member that holds the substrate on the floating unit, a grip transfer unit that moves the grip unit in a first direction, and an illumination unit that generates light. The inspection unit inspects the substrate that floats on the floating unit, the illumination unit is disposed on a moving path of the grip unit, and the light generated by the illumination unit is irradiated onto the inspection unit. The first grip member includes a first adsorption pad that adsorbs the substrate, and a first support member that supports the first adsorption pad and that includes a first opening into which the illumination unit is inserted."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Grip apparatus and substrate inspection system including the same, and method of manufacturing semiconductor device using the substrate inspection system","description":"A substrate inspection system includes a floating unit that floats a substrate, an inspection unit disposed above the floating unit, a grip unit disposed below the inspection unit and including a firs","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10532896","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10532896","citation_suggestion":"Patentable. \"Grip apparatus and substrate inspection system including the same, and method of manufacturing semiconductor device using the substrate inspection system\" (US-10532896). https://patentable.app/patents/US-10532896","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10532896","json":"https://patentable.app/api/llm-context/US-10532896","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:06:37.906Z"}