{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10534353","patent":{"patent_number":"US-10534353","title":"System and method to reduce pre-back-grinding process defects","assignee":null,"inventors":[],"filing_date":"2013-10-03T00:00:00.000Z","publication_date":"2020-01-14T00:00:00.000Z","cpc_codes":["G05B"],"num_claims":20,"abstract":"A system for reducing processing defects during processing of a semiconductor wafer prior to back-grinding the wafer includes a table having one or more holes formed therein, wherein the table comprises at least one of a chuck table or a support table, wherein the holes are perpendicular to the surface upon which a pre-back-grinding (PBG) process occurs. The system further includes one or more sensors disposed in said holes for monitoring a parameter during the PBG process. The system further includes a computer-implemented process control tool coupled with the one or more sensors and configured to determine whether the PBG process will continue."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"System and method to reduce pre-back-grinding process defects","description":"A system for reducing processing defects during processing of a semiconductor wafer prior to back-grinding the wafer includes a table having one or more holes formed therein, wherein the table compris","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10534353","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10534353","citation_suggestion":"Patentable. \"System and method to reduce pre-back-grinding process defects\" (US-10534353). https://patentable.app/patents/US-10534353","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10534353","json":"https://patentable.app/api/llm-context/US-10534353","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T17:39:19.219Z"}