{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10534355","patent":{"patent_number":"US-10534355","title":"Information processing device, processing device, prediction method, and processing method","assignee":null,"inventors":[],"filing_date":"2016-01-08T00:00:00.000Z","publication_date":"2020-01-14T00:00:00.000Z","cpc_codes":["G05B","G06F","H01L","H01L","H01L","H01L"],"num_claims":12,"abstract":"Efficiency of prediction of a physical quantity increases in repeated simulation of an etching process with a change of parameters. An information processing device includes a base shape storage unit and a physical quantity prediction unit. The base shape storage unit of the information processing device stores a shape of a sample etched within a chamber as a base shape. On the other hand, the physical quantity prediction unit of the information processing device predicts a physical quantity within the chamber on the basis of a processing condition determined for the sample and associated with the physical quantity and the base shape."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Information processing device, processing device, prediction method, and processing method","description":"Efficiency of prediction of a physical quantity increases in repeated simulation of an etching process with a change of parameters. An information processing device includes a base shape storage unit ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10534355","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10534355","citation_suggestion":"Patentable. \"Information processing device, processing device, prediction method, and processing method\" (US-10534355). https://patentable.app/patents/US-10534355","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10534355","json":"https://patentable.app/api/llm-context/US-10534355","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:23:29.121Z"}