{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10535132","patent":{"patent_number":"US-10535132","title":"Method for determining a distance between a first structure element on a substrate and a second structure element","assignee":null,"inventors":[],"filing_date":"2017-09-22T00:00:00.000Z","publication_date":"2020-01-14T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T","G06T","G06T","G06T","G06T","G06T"],"num_claims":21,"abstract":"Provision is made of a method for determining a distance between a first structure element on a substrate and a second structure element, comprising the following steps: providing a first series of first images, wherein each of the first images comprises at least the first structure element, providing a second series of second images, wherein each of the second images comprises at least the second structure element. The method includes, for each image of the first and second series: determining a respective correlation function from a respective first image of the first series and a respective second image of the second series. The method includes determining an ensemble correlation function from the correlation functions, and determining the distance from the ensemble correlation function.Furthermore, a microscope for carrying out the method is provided."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for determining a distance between a first structure element on a substrate and a second structure element","description":"Provision is made of a method for determining a distance between a first structure element on a substrate and a second structure element, comprising the following steps: providing a first series of fi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10535132","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10535132","citation_suggestion":"Patentable. \"Method for determining a distance between a first structure element on a substrate and a second structure element\" (US-10535132). https://patentable.app/patents/US-10535132","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10535132","json":"https://patentable.app/api/llm-context/US-10535132","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T04:00:33.039Z"}