{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10535559","patent":{"patent_number":"US-10535559","title":"Semiconductor interconnect structure having a graphene barrier layer","assignee":null,"inventors":[],"filing_date":"2019-04-30T00:00:00.000Z","publication_date":"2020-01-14T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"The present disclosure relates to a semiconductor device and a manufacturing method, and more particularly to a semiconductor interconnect structure incorporating a graphene barrier layer. The present disclosure provides a method of forming a graphene barrier layer on select surfaces using a self-assembly monolayer (SAM). The SAM layer can be selectively formed on dielectric surfaces and annealed to form thin graphene barrier layers. The thickness of the graphene barrier layers can be selected by choosing different alkyl groups of the SAM layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Semiconductor interconnect structure having a graphene barrier layer","description":"The present disclosure relates to a semiconductor device and a manufacturing method, and more particularly to a semiconductor interconnect structure incorporating a graphene barrier layer. The present","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10535559","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10535559","citation_suggestion":"Patentable. \"Semiconductor interconnect structure having a graphene barrier layer\" (US-10535559). https://patentable.app/patents/US-10535559","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10535559","json":"https://patentable.app/api/llm-context/US-10535559","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T11:10:25.492Z"}