{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10535756","patent":{"patent_number":"US-10535756","title":"Method for producing pillar-shaped semiconductor device","assignee":null,"inventors":[],"filing_date":"2019-01-07T00:00:00.000Z","publication_date":"2020-01-14T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":21,"abstract":"The method for producing a pillar-shaped semiconductor device includes a step of providing a structure that includes, on an i layer substrate, a Si pillar and an impurity region located in a lower portion of the Si pillar and serving as a source or a drain, a step of forming a SiO2 layer that extends in a horizontal direction and is connected to an entire periphery of the impurity region in plan view, a step of forming a SiO2 layer on the SiO2 layer such that the SiO2 layer surrounds the Si pillar in plan view, a step of forming a resist layer that is partly connected to the SiO2 layer in plan view, and a step of forming a SiO2 layer by etching the SiO2 layer below the SiO2 layer and the resist layer using the SiO2 layer and the resist layer as masks."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for producing pillar-shaped semiconductor device","description":"The method for producing a pillar-shaped semiconductor device includes a step of providing a structure that includes, on an i layer substrate, a Si pillar and an impurity region located in a lower por","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10535756","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10535756","citation_suggestion":"Patentable. \"Method for producing pillar-shaped semiconductor device\" (US-10535756). https://patentable.app/patents/US-10535756","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10535756","json":"https://patentable.app/api/llm-context/US-10535756","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:13:22.342Z"}