{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10537997","patent":{"patent_number":"US-10537997","title":"Sensor based auto-calibration wafer","assignee":null,"inventors":[],"filing_date":"2017-05-10T00:00:00.000Z","publication_date":"2020-01-21T00:00:00.000Z","cpc_codes":["B25J","H01L","H01L","B25J","B25J","B25J","B25J","G05B","G05B","G05B","G05B"],"num_claims":20,"abstract":"Embodiments described herein generally relate to an apparatus and method of performing a robot calibration process within a substrate processing system. In one embodiment, a calibration device is used to calibrate a robot having an end effector. The calibration device includes a body, a first side and a second side opposite to the first side. The calibration device further includes a sensor disposed on the second side of the body. In some embodiments, the sensor covers the entire second side of the body. In this configuration, because the sensor covers the entire second side of the body of the calibration device, the calibration device can be utilized to sense the contact between the sensor and various differently configured chamber components found in different types of processing chambers or stations disposed within a processing system during a calibration process performed in each of the different processing chambers or stations."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Sensor based auto-calibration wafer","description":"Embodiments described herein generally relate to an apparatus and method of performing a robot calibration process within a substrate processing system. In one embodiment, a calibration device is used","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10537997","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10537997","citation_suggestion":"Patentable. \"Sensor based auto-calibration wafer\" (US-10537997). https://patentable.app/patents/US-10537997","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10537997","json":"https://patentable.app/api/llm-context/US-10537997","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:12:19.219Z"}