{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10540759","patent":{"patent_number":"US-10540759","title":"Bonded wafer metrology","assignee":null,"inventors":[],"filing_date":"2017-06-20T00:00:00.000Z","publication_date":"2020-01-21T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T","G06T","H01L","G06T","G06T","H01L","H01L"],"num_claims":17,"abstract":"Wafer edge profile images are analyzed at locations around a bonded wafer, which may have a top wafer and a carrier wafer. An offset curve is generated based on the wafer edge profile images. Displacement of the top wafer to the carrier wafer is determined based on the offset curve. The wafer edge profile images may be generated at multiple locations around the wafer. The wafer edge profile images may be shadowgram images. A system to determine displacement of the top wafer to the carrier wafer can include an imaging system connected with a controller."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Bonded wafer metrology","description":"Wafer edge profile images are analyzed at locations around a bonded wafer, which may have a top wafer and a carrier wafer. An offset curve is generated based on the wafer edge profile images. Displace","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10540759","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10540759","citation_suggestion":"Patentable. \"Bonded wafer metrology\" (US-10540759). https://patentable.app/patents/US-10540759","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10540759","json":"https://patentable.app/api/llm-context/US-10540759","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T19:44:39.820Z"}