{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10541143","patent":{"patent_number":"US-10541143","title":"Self-aligned build-up of topographic features","assignee":null,"inventors":[],"filing_date":"2016-03-30T00:00:00.000Z","publication_date":"2020-01-21T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":20,"abstract":"Methods and architectures for self-aligned build-up of patterned features. An initial patterned feature aspect ratio may be maintained or increased, for example to mitigate erosion of the feature during one or more subtractive device fabrication processes. A patterned feature height may be increased without altering an effective spacing between adjacent features that may be further relied upon, for example to further pattern an underlying material. A patterned feature may be conformally capped with a material, such as a metal or dielectric, in a self-aligned manner, for example to form a functional device layer on an initial pattern having a suitable space width-to-line height aspect ratio without the use of a masked etch to define the cap."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Self-aligned build-up of topographic features","description":"Methods and architectures for self-aligned build-up of patterned features. An initial patterned feature aspect ratio may be maintained or increased, for example to mitigate erosion of the feature duri","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10541143","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10541143","citation_suggestion":"Patentable. \"Self-aligned build-up of topographic features\" (US-10541143). https://patentable.app/patents/US-10541143","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10541143","json":"https://patentable.app/api/llm-context/US-10541143","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T07:59:13.196Z"}