{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10545098","patent":{"patent_number":"US-10545098","title":"Foreign substance inspection apparatus, processing apparatus, and method of manufacturing article","assignee":null,"inventors":[],"filing_date":"2019-03-15T00:00:00.000Z","publication_date":"2020-01-28T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N","H01L","G01N","G01N","G01N"],"num_claims":14,"abstract":"A foreign substance inspection apparatus performs foreign substance detection processing of detecting a foreign substance present on a surface of a substrate. The apparatus includes a detector that includes a projector configured to project light onto the surface and an optical receiver configured to receive scattered light from the surface, a scanning mechanism configured to scan a position on the surface onto which the light is projected by the projector, and a controller configured to control the foreign substance detection processing so that detection of the foreign substance is performed on a detection region which is a region excluding, from the surface, an exclusion region where a step is present thereon, wherein the controller controls the projection by the projector so that light is not projected to the step."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Foreign substance inspection apparatus, processing apparatus, and method of manufacturing article","description":"A foreign substance inspection apparatus performs foreign substance detection processing of detecting a foreign substance present on a surface of a substrate. The apparatus includes a detector that in","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10545098","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10545098","citation_suggestion":"Patentable. \"Foreign substance inspection apparatus, processing apparatus, and method of manufacturing article\" (US-10545098). https://patentable.app/patents/US-10545098","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10545098","json":"https://patentable.app/api/llm-context/US-10545098","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T04:03:47.807Z"}