{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10545409","patent":{"patent_number":"US-10545409","title":"Dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay","assignee":null,"inventors":[],"filing_date":"2019-05-30T00:00:00.000Z","publication_date":"2020-01-28T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":17,"abstract":"A method of optimizing a lithographic process for semiconductor fabrication includes determining that a semiconductor wafer experienced a photoresist exposure delay. At least one operating parameter of a post exposure baking process is adjusted based on the semiconductor wafer having experienced the photoresist exposure delay. The post exposure baking process is performed on the semiconductor wafer utilizing the adjusted at least one operating parameter."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay","description":"A method of optimizing a lithographic process for semiconductor fabrication includes determining that a semiconductor wafer experienced a photoresist exposure delay. At least one operating parameter o","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10545409","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10545409","citation_suggestion":"Patentable. \"Dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay\" (US-10545409). https://patentable.app/patents/US-10545409","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10545409","json":"https://patentable.app/api/llm-context/US-10545409","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T16:51:07.234Z"}