{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10546374","patent":{"patent_number":"US-10546374","title":"SEM inspection apparatus and pattern matching method","assignee":null,"inventors":[],"filing_date":"2018-03-06T00:00:00.000Z","publication_date":"2020-01-28T00:00:00.000Z","cpc_codes":["G06T","G01N","G06T","H01L","G06T","G06T"],"num_claims":16,"abstract":"According to one embodiment, an SEM inspection apparatus includes an arithmetic processor. The arithmetic processor acquires design data corresponding to an inspection region. The arithmetic processor obtains a resistance component between each of wiring lines included in the inspection region and a portion on a substrate connected thereto, on a basis of the design data. The arithmetic processor obtains a capacitance component between each of the wiring lines included in the inspection region and the portion on the substrate connected thereto, on a basis of the design data. The arithmetic processor color-codes the wiring lines included in the inspection region of the design data, on a basis of a combination of the resistance component and the capacitance component. The arithmetic processor corrects a coordinate deviation between an SEM image and the color-coded design data by performing pattern matching between the color-coded design data and the SEM image."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"SEM inspection apparatus and pattern matching method","description":"According to one embodiment, an SEM inspection apparatus includes an arithmetic processor. The arithmetic processor acquires design data corresponding to an inspection region. The arithmetic processor","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10546374","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10546374","citation_suggestion":"Patentable. \"SEM inspection apparatus and pattern matching method\" (US-10546374). https://patentable.app/patents/US-10546374","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10546374","json":"https://patentable.app/api/llm-context/US-10546374","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T09:22:16.114Z"}