{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-10546746","patent":{"patent_number":"US-10546746","title":"Process of forming semiconductor epitaxial substrate","assignee":null,"inventors":[],"filing_date":"2018-06-26T00:00:00.000Z","publication_date":"2020-01-28T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":18,"abstract":"A process of growing a barrier layer made of AlGaN on a GaN channel layer is disclosed. The process includes steps of, growing the GaN channel layer, growing the AlGaN barrier layer, and growing a cap layer made of GaN. The growth temperature of the AlGaN barrier layer monotonically lowers from the initial temperature, which may be equal to the growth temperature for the GaN channel layer, to the finish temperature that is lower than the initial temperature and may be substantially equal to the growth temperature of the GaN cap layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Process of forming semiconductor epitaxial substrate","description":"A process of growing a barrier layer made of AlGaN on a GaN channel layer is disclosed. The process includes steps of, growing the GaN channel layer, growing the AlGaN barrier layer, and growing a cap","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-10546746","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-10546746","citation_suggestion":"Patentable. \"Process of forming semiconductor epitaxial substrate\" (US-10546746). https://patentable.app/patents/US-10546746","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-10546746","json":"https://patentable.app/api/llm-context/US-10546746","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T14:11:04.982Z"}