{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11232971","patent":{"patent_number":"US-11232971","title":"Workpiece holding mechanism, process system and manufacturing method of semiconductor structure","assignee":null,"inventors":[],"filing_date":"2019-12-18T00:00:00.000Z","publication_date":"2022-01-25T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":20,"abstract":"A workpiece holding mechanism, a process system and a manufacturing method of a semiconductor structure are provided. The workpiece holding mechanism is used in a vacuum chamber, and includes a stage, a platen and a workpiece clamper. The platen is disposed over the stage, and configured to support a workpiece. The workpiece clamper is standing on the stage, and configured to clamp the workpiece from above the workpiece. The workpiece clamper includes a plurality of supporting elements and an elevated structure. The supporting elements are connected between the stage and the elevated structure. The platen is surrounded by the supporting elements. The elevated structure is configured to physically contact a peripheral region of the workpiece from above the workpiece."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Workpiece holding mechanism, process system and manufacturing method of semiconductor structure","description":"A workpiece holding mechanism, a process system and a manufacturing method of a semiconductor structure are provided. The workpiece holding mechanism is used in a vacuum chamber, and includes a stage,","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11232971","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11232971","citation_suggestion":"Patentable. \"Workpiece holding mechanism, process system and manufacturing method of semiconductor structure\" (US-11232971). https://patentable.app/patents/US-11232971","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11232971","json":"https://patentable.app/api/llm-context/US-11232971","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T07:36:49.778Z"}