{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11236418","patent":{"patent_number":"US-11236418","title":"Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing","assignee":null,"inventors":[],"filing_date":"2020-04-20T00:00:00.000Z","publication_date":"2022-02-01T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"Methods for gapfill of high aspect ratio features are described. A first film is deposited on the bottom and upper sidewalls of a feature. The first film is etched from the sidewalls of the feature and the first film in the bottom of the feature is treated to form a second film. The deposition, etch and treat processes are repeated to fill the feature."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing","description":"Methods for gapfill of high aspect ratio features are described. A first film is deposited on the bottom and upper sidewalls of a feature. The first film is etched from the sidewalls of the feature an","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11236418","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11236418","citation_suggestion":"Patentable. \"Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing\" (US-11236418). https://patentable.app/patents/US-11236418","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11236418","json":"https://patentable.app/api/llm-context/US-11236418","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:34:03.682Z"}