{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11237043","patent":{"patent_number":"US-11237043","title":"Stress reduced diaphragm for a micro-electro-mechanical system sensor","assignee":null,"inventors":[],"filing_date":"2019-08-16T00:00:00.000Z","publication_date":"2022-02-01T00:00:00.000Z","cpc_codes":["H04R"],"num_claims":20,"abstract":"A micro-electro-mechanical system (MEMS) sensor can comprise a substantially rigid layer having a center. The MEMS sensor can further comprise a movable membrane that can be separated by a gap from, and be disposed substantially parallel to, the substantially rigid layer. The MEMS sensor can further include a plurality of pedestals extending into the gap, where a first pedestal of the plurality of pedestals can be of a first size, and be disposed a first distance from the center, and a second pedestal of the plurality of pedestals can be a second size different from the first size, and be disposed at a second distance from the center. In another aspect, the substantially rigid layer and the movable membrane can be suspended by a plurality of suspension points. In another aspect, at least one of the plurality of pedestals can be disposed so as to limit a deformation of the movable membrane."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Stress reduced diaphragm for a micro-electro-mechanical system sensor","description":"A micro-electro-mechanical system (MEMS) sensor can comprise a substantially rigid layer having a center. The MEMS sensor can further comprise a movable membrane that can be separated by a gap from, a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11237043","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11237043","citation_suggestion":"Patentable. \"Stress reduced diaphragm for a micro-electro-mechanical system sensor\" (US-11237043). https://patentable.app/patents/US-11237043","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11237043","json":"https://patentable.app/api/llm-context/US-11237043","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T00:39:59.994Z"}