{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11243070","patent":{"patent_number":"US-11243070","title":"Apparatus and method for multilayer thin film thickness measurement using single-shot angle-resolved spectral reflectometry","assignee":null,"inventors":[],"filing_date":"2020-02-27T00:00:00.000Z","publication_date":"2022-02-08T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":7,"abstract":"In the embodiment in association with the present disclosure, an apparatus and method for multilayer thin film thickness measurement using single-shot angle-resolved spectral reflectometry are provided which allow simultaneously obtaining the absolute reflectance and phase data of a measurement object over a broad wavelength range and wide incident angle according to various polarization states by a single-shot measurement."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus and method for multilayer thin film thickness measurement using single-shot angle-resolved spectral reflectometry","description":"In the embodiment in association with the present disclosure, an apparatus and method for multilayer thin film thickness measurement using single-shot angle-resolved spectral reflectometry are provide","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11243070","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11243070","citation_suggestion":"Patentable. \"Apparatus and method for multilayer thin film thickness measurement using single-shot angle-resolved spectral reflectometry\" (US-11243070). https://patentable.app/patents/US-11243070","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11243070","json":"https://patentable.app/api/llm-context/US-11243070","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T08:28:04.127Z"}