{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11243175","patent":{"patent_number":"US-11243175","title":"Sensitive particle detection with spatially-varying polarization rotator and polarizer","assignee":null,"inventors":[],"filing_date":"2021-02-12T00:00:00.000Z","publication_date":"2022-02-08T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","H01L","G01N"],"num_claims":45,"abstract":"A system may include illumination optics to direct an illumination beam to a sample at an off-axis angle, collection optics to collect scattered light from the sample, and a phase mask located at a first pupil plane to provide different phase shifts for light in two or more pupil regions of a collection area to reshape a point spread function of light scattered from one or more particles on a surface of the sample. The system may further include a polarization rotator located at a second pupil plane, where the polarization rotator provides a spatially-varying polarization rotation angle selected to rotate light scattered from the surface of the sample to a selected polarization angle, a polarizer to reject light polarized along the selected polarization angle, and a detector to generate a dark-field image of the sample based on light passed by the polarizer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Sensitive particle detection with spatially-varying polarization rotator and polarizer","description":"A system may include illumination optics to direct an illumination beam to a sample at an off-axis angle, collection optics to collect scattered light from the sample, and a phase mask located at a fi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11243175","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11243175","citation_suggestion":"Patentable. \"Sensitive particle detection with spatially-varying polarization rotator and polarizer\" (US-11243175). https://patentable.app/patents/US-11243175","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11243175","json":"https://patentable.app/api/llm-context/US-11243175","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:16:01.720Z"}