{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11243480","patent":{"patent_number":"US-11243480","title":"System for making accurate grating patterns using multiple writing columns each making multiple scans","assignee":null,"inventors":[],"filing_date":"2019-05-31T00:00:00.000Z","publication_date":"2022-02-08T00:00:00.000Z","cpc_codes":["G02F","G02F"],"num_claims":20,"abstract":"A lithography system for generating grating structures is provided having a multiple column imaging system located on a bridge capable of moving in a cross-scan direction, a mask having a grating pattern with a fixed spatial frequency located in an object plane of the imaging system, a multiple line alignment mark aligned to the grating pattern and having a fixed spatial frequency, a platen configured to hold and scan a substrate, a scanning system configured to move the platen over a distance greater than a desired length of the grating pattern on the substrate, a longitudinal encoder scale attached to the platen and oriented in a scan direction and at least two encoder scales attached to the platen and arrayed in the cross-scan direction wherein the scales contain periodically spaced alignment marks having a fixed spatial frequency."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"System for making accurate grating patterns using multiple writing columns each making multiple scans","description":"A lithography system for generating grating structures is provided having a multiple column imaging system located on a bridge capable of moving in a cross-scan direction, a mask having a grating patt","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11243480","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11243480","citation_suggestion":"Patentable. \"System for making accurate grating patterns using multiple writing columns each making multiple scans\" (US-11243480). https://patentable.app/patents/US-11243480","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11243480","json":"https://patentable.app/api/llm-context/US-11243480","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T09:16:53.682Z"}