{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11244442","patent":{"patent_number":"US-11244442","title":"Method and system for correlating optical images with scanning electron microscopy images","assignee":null,"inventors":[],"filing_date":"2019-07-11T00:00:00.000Z","publication_date":"2022-02-08T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T"],"num_claims":24,"abstract":"The correlation of optical images with SEM images includes acquiring a full optical image of a sample by scanning the sample with an optical inspection sub-system, storing the full optical image, identifying a location of a feature-of-interest present in the full optical image with an additional sources, acquiring an SEM image of a portion of the sample that includes the feature at the identified location with a SEM tool, acquiring an optical image portion at the location identified by the additional source, the image portions including a reference structure, correlating the image portion and the SEM image based on the presence of the feature-of-interest and the reference structure in both the image portions and the SEM image, and transferring a location of the feature-of-interest in the SEM image into the coordinate system of the image portion of the full optical image to form a corrected optical image."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and system for correlating optical images with scanning electron microscopy images","description":"The correlation of optical images with SEM images includes acquiring a full optical image of a sample by scanning the sample with an optical inspection sub-system, storing the full optical image, iden","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11244442","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11244442","citation_suggestion":"Patentable. \"Method and system for correlating optical images with scanning electron microscopy images\" (US-11244442). https://patentable.app/patents/US-11244442","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11244442","json":"https://patentable.app/api/llm-context/US-11244442","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:46:45.868Z"}