{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11244444","patent":{"patent_number":"US-11244444","title":"Method and apparatus for analyzing semiconductor wafer","assignee":null,"inventors":[],"filing_date":"2019-11-13T00:00:00.000Z","publication_date":"2022-02-08T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T","G06T","G06T","G06T"],"num_claims":19,"abstract":"The present invention provides a method and apparatus for analyzing a semiconductor wafer for analyzing a defect distribution pattern on a semiconductor wafer to be tested. The method comprises: obtaining a defect distribution map of the semiconductor wafer to be tested, the defect distribution map indicating a defect distribution within a surface of the semiconductor wafer to be tested; establishing a three-dimensional model to be tested according to the defect distribution map, wherein an XY plane of the three-dimensional model to be tested corresponds to the surface of the semiconductor wafer to be tested, and a Z-axis of the three-dimensional model to be tested corresponds to the number of defects in each grid unit in the XY plane."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and apparatus for analyzing semiconductor wafer","description":"The present invention provides a method and apparatus for analyzing a semiconductor wafer for analyzing a defect distribution pattern on a semiconductor wafer to be tested. The method comprises: obtai","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11244444","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11244444","citation_suggestion":"Patentable. \"Method and apparatus for analyzing semiconductor wafer\" (US-11244444). https://patentable.app/patents/US-11244444","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11244444","json":"https://patentable.app/api/llm-context/US-11244444","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T15:53:47.388Z"}