{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11251017","patent":{"patent_number":"US-11251017","title":"Method for evaluating secondary optical system of electron beam inspection device","assignee":null,"inventors":[],"filing_date":"2020-06-03T00:00:00.000Z","publication_date":"2022-02-15T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":19,"abstract":"A method for evaluating a secondary optical system of an electron beam inspection device provided with a primary optical system that irradiates a sample placed at an observation target position with an electron beam emitted from an electron source, and the secondary optical system that forms, on a detector, an enlarged image of an electron beam generated from the sample or an electron beam transmitted through the sample. The method includes: placing a photoelectric surface at the observation target position; irradiating the photoelectric surface with laser; forming an enlarged image of an electron beam generated from the photoelectric surface on the detector by the secondary optical system; and evaluating the secondary optical system based on an electron beam image obtained by the detector."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for evaluating secondary optical system of electron beam inspection device","description":"A method for evaluating a secondary optical system of an electron beam inspection device provided with a primary optical system that irradiates a sample placed at an observation target position with a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11251017","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11251017","citation_suggestion":"Patentable. \"Method for evaluating secondary optical system of electron beam inspection device\" (US-11251017). https://patentable.app/patents/US-11251017","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11251017","json":"https://patentable.app/api/llm-context/US-11251017","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T07:34:40.434Z"}