{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11251066","patent":{"patent_number":"US-11251066","title":"Transfer unit and substrate processing apparatus including the same","assignee":null,"inventors":[],"filing_date":"2019-05-14T00:00:00.000Z","publication_date":"2022-02-15T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":18,"abstract":"The substrate processing apparatus includes a processing unit and a transfer unit that transfers a substrate into the processing unit. The processing unit includes a support unit that supports the substrate in the process chamber. The support unit includes a support on which the substrate is placed and an edge ring that surrounds the substrate placed on the support and that is detachable from the support. The transfer unit includes a hand having a top side on which the substrate is placed and a fixing member that is provided in the hand and that fixes the edge ring to a bottom side of the hand with an electrostatic force. The fixing member includes a first electrode and second electrode, and the transfer unit further includes a voltage applying device that applies voltages of different polarities to the first electrode and the second electrode."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Transfer unit and substrate processing apparatus including the same","description":"The substrate processing apparatus includes a processing unit and a transfer unit that transfers a substrate into the processing unit. The processing unit includes a support unit that supports the sub","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11251066","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11251066","citation_suggestion":"Patentable. \"Transfer unit and substrate processing apparatus including the same\" (US-11251066). https://patentable.app/patents/US-11251066","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11251066","json":"https://patentable.app/api/llm-context/US-11251066","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T15:56:28.016Z"}