{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11254559","patent":{"patent_number":"US-11254559","title":"FET based sensory systems","assignee":null,"inventors":[],"filing_date":"2018-03-04T00:00:00.000Z","publication_date":"2022-02-22T00:00:00.000Z","cpc_codes":["B82Y","G01C","G01C","G01N","H04R","H04R","H04R","H04R"],"num_claims":9,"abstract":"This invention describes the structure and function of an integrated multi-sensing system. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor, multi-axis gyroscope or accelerometer. The sensor uses a variety of different Field Effect Transistor technologies (horizontal, vertical, Si nanowire, CNT, SiC and III-V semiconductors) in conjunction with MEMS based structures such as cantilevers, membranes and proof masses integrated into silicon substrates. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electronic design."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"FET based sensory systems","description":"This invention describes the structure and function of an integrated multi-sensing system. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor, mult","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11254559","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11254559","citation_suggestion":"Patentable. \"FET based sensory systems\" (US-11254559). https://patentable.app/patents/US-11254559","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11254559","json":"https://patentable.app/api/llm-context/US-11254559","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T19:45:03.380Z"}