{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11257206","patent":{"patent_number":"US-11257206","title":"Method for correcting processing condition and substrate processing system","assignee":null,"inventors":[],"filing_date":"2019-08-08T00:00:00.000Z","publication_date":"2022-02-22T00:00:00.000Z","cpc_codes":["G06T","G01N","G01N","G06T","H01L","H01L","H01L","G06T","H01L","H01L"],"num_claims":14,"abstract":"A method for correcting a processing condition includes imaging a substrate using an imaging device before start and after completion of a series of processings; specifying a processing apparatus estimated as having an abnormality, based on an imaging result and information on the processing apparatus; performing the unit processing in the processing apparatus on an inspection substrate under a predetermined processing condition, and imaging the inspection substrate by the imaging device before and after performing the unit processing; determining presence/absence of an actual abnormality in the processing apparatus specified in the specifying; and correcting, with respect to the processing apparatus determined as having the actual abnormality in the determining presence/absence of an actual abnormality, the processing condition of the unit processing in the processing apparatus based on the imaging result in the imaging the inspection substrate for determining an abnormality."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for correcting processing condition and substrate processing system","description":"A method for correcting a processing condition includes imaging a substrate using an imaging device before start and after completion of a series of processings; specifying a processing apparatus esti","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11257206","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11257206","citation_suggestion":"Patentable. \"Method for correcting processing condition and substrate processing system\" (US-11257206). https://patentable.app/patents/US-11257206","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11257206","json":"https://patentable.app/api/llm-context/US-11257206","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T23:23:56.766Z"}