{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11259106","patent":{"patent_number":"US-11259106","title":"Mems device with dynamic valve layer","assignee":null,"inventors":[],"filing_date":"2020-11-06T00:00:00.000Z","publication_date":"2022-02-22T00:00:00.000Z","cpc_codes":["H04R","H04R","H04R","H04R","H04R","H04R"],"num_claims":23,"abstract":"A micro-electro-mechanical system (MEMS) device is provided. The MEMS device includes a substrate, a backplate disposed on a side of the substrate, a diaphragm, and a dynamic valve layer. The substrate forms an opening. The diaphragm is disposed on the side of the substrate and extends across the opening of the substrate, wherein the diaphragm forms a vent hole. The dynamic valve layer is disposed on the side of the substrate and includes a flap portion, wherein the flap portion covers at least a part of the vent hole when viewed in a direction perpendicular to the diaphragm, and the flap portion deforms when air flows through the vent hole."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Mems device with dynamic valve layer","description":"A micro-electro-mechanical system (MEMS) device is provided. The MEMS device includes a substrate, a backplate disposed on a side of the substrate, a diaphragm, and a dynamic valve layer. The substrat","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11259106","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11259106","citation_suggestion":"Patentable. \"Mems device with dynamic valve layer\" (US-11259106). https://patentable.app/patents/US-11259106","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11259106","json":"https://patentable.app/api/llm-context/US-11259106","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T15:25:35.803Z"}