{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11262575","patent":{"patent_number":"US-11262575","title":"MEMS package with double-sided mirror","assignee":null,"inventors":[],"filing_date":"2019-03-01T00:00:00.000Z","publication_date":"2022-03-01T00:00:00.000Z","cpc_codes":["G01S","G01S","G01S","G01S"],"num_claims":14,"abstract":"Methods and systems for using a dual sided MEMS mirror for determining a direction of steered light are disclosed. In one example a MEMS package includes a substrate defining an aperture and a dual sided MEMS mirror is positioned over the aperture. A first surface of the MEMS mirror is used to steer a LiDAR beam that is used to perform LiDAR imaging of an area of interest. As the mirror is moved, a second surface of the mirror reflects a sensing beam onto a detector array. Data from the detector array is used to determine an orientation of the mirror which can then be used to determine a direction of the steered LiDAR beam. The MEMS package can form an enclosure for the MEMS mirror that includes a first and a second transparent window attached to two opposing surfaces of the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"MEMS package with double-sided mirror","description":"Methods and systems for using a dual sided MEMS mirror for determining a direction of steered light are disclosed. In one example a MEMS package includes a substrate defining an aperture and a dual si","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11262575","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11262575","citation_suggestion":"Patentable. \"MEMS package with double-sided mirror\" (US-11262575). https://patentable.app/patents/US-11262575","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11262575","json":"https://patentable.app/api/llm-context/US-11262575","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T08:28:04.039Z"}