{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11264206","patent":{"patent_number":"US-11264206","title":"Methods and systems for forming a pattern on a surface using multi-beam charged particle beam lithography","assignee":null,"inventors":[],"filing_date":"2019-10-17T00:00:00.000Z","publication_date":"2022-03-01T00:00:00.000Z","cpc_codes":["G06N","G06N","G06N","G06N","G06T","G06T"],"num_claims":14,"abstract":"Methods for fracturing or mask data preparation are disclosed in which a set of single-beam charged particle beam shots is input; a calculated image is calculated using a neural network, from the set of single-beam charged particle beam shots; and a set of multi-beam shots is generated based on the calculated image, to convert the set of single-beam charged particle beam shots to the set of multi-beam shots which will produce a surface image on the surface. Methods for training a neural network include inputting a set of single-beam charged particle beam shots; calculating a set of calculated images using the set of single-beam charged particle beam shots; and training the neural network with the set of calculated images."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Methods and systems for forming a pattern on a surface using multi-beam charged particle beam lithography","description":"Methods for fracturing or mask data preparation are disclosed in which a set of single-beam charged particle beam shots is input; a calculated image is calculated using a neural network, from the set ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11264206","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11264206","citation_suggestion":"Patentable. \"Methods and systems for forming a pattern on a surface using multi-beam charged particle beam lithography\" (US-11264206). https://patentable.app/patents/US-11264206","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11264206","json":"https://patentable.app/api/llm-context/US-11264206","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T09:14:53.914Z"}