{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11264247","patent":{"patent_number":"US-11264247","title":"Method for forming etching mask and method for manufacturing semiconductor device","assignee":null,"inventors":[],"filing_date":"2020-08-19T00:00:00.000Z","publication_date":"2022-03-01T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"According to one or more embodiments, a method for forming an etching mask includes forming a mask layer including a first organic material on a processing object, processing the mask layer to form a pattern including an opening, exposing the mask layer to a first oxidizing gas containing a first metal material such that the first metal material penetrates into the mask layer, and then exposing the mask layer to a first oxidizing gas including hydrogen peroxide or ozone to oxidize the first metal material."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for forming etching mask and method for manufacturing semiconductor device","description":"According to one or more embodiments, a method for forming an etching mask includes forming a mask layer including a first organic material on a processing object, processing the mask layer to form a ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11264247","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11264247","citation_suggestion":"Patentable. \"Method for forming etching mask and method for manufacturing semiconductor device\" (US-11264247). https://patentable.app/patents/US-11264247","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11264247","json":"https://patentable.app/api/llm-context/US-11264247","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:47:49.771Z"}