{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11267988","patent":{"patent_number":"US-11267988","title":"Polishing liquid and chemical mechanical polishing method","assignee":null,"inventors":[],"filing_date":"2020-07-27T00:00:00.000Z","publication_date":"2022-03-08T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":20,"abstract":"A polishing liquid is a polishing liquid used for chemical mechanical polishing, the polishing liquid including colloidal silica; and a buffering agent excluding phosphoric acid, in which the buffering agent is a compound having a pKa within a range of X±1 in a case where a pH of the polishing liquid is denoted by X, a zeta potential of the colloidal silica measured in a state where the colloidal silica is present in the polishing liquid is −20 mV or less, an electrical conductivity is 200 μS/cm or more, and a pH is 2 to 6."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Polishing liquid and chemical mechanical polishing method","description":"A polishing liquid is a polishing liquid used for chemical mechanical polishing, the polishing liquid including colloidal silica; and a buffering agent excluding phosphoric acid, in which the bufferin","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11267988","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11267988","citation_suggestion":"Patentable. \"Polishing liquid and chemical mechanical polishing method\" (US-11267988). https://patentable.app/patents/US-11267988","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11267988","json":"https://patentable.app/api/llm-context/US-11267988","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T14:59:54.296Z"}