{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11269257","patent":{"patent_number":"US-11269257","title":"Apparatus and method for generating extreme ultraviolet radiation","assignee":null,"inventors":[],"filing_date":"2020-10-12T00:00:00.000Z","publication_date":"2022-03-08T00:00:00.000Z","cpc_codes":["G06F"],"num_claims":20,"abstract":"An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. An energy detector is configured to measure a variation in EUV energy generated when the target droplets are converted to plasma. A feedback controller is configured to adjust parameters of the droplet generator and/or the excitation laser based on the variation in EUV energy."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus and method for generating extreme ultraviolet radiation","description":"An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11269257","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11269257","citation_suggestion":"Patentable. \"Apparatus and method for generating extreme ultraviolet radiation\" (US-11269257). https://patentable.app/patents/US-11269257","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11269257","json":"https://patentable.app/api/llm-context/US-11269257","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T09:16:24.756Z"}