{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11275034","patent":{"patent_number":"US-11275034","title":"Inspection apparatus and method based on coherent diffraction imaging (CDI)","assignee":null,"inventors":[],"filing_date":"2020-09-16T00:00:00.000Z","publication_date":"2022-03-15T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N"],"num_claims":18,"abstract":"An inspection apparatus includes: a light source that generates and outputs light; a stage on which an inspection target is arranged; an irradiation optical system that irradiates light from the light source to the inspection target; a detector that receives the light diffracted from the inspection target and generates diffraction image; and a detector moving device configured to move the detector on a z-axis, which is an optical axis of the light, and an x-y plane perpendicular to the z-axis. Furthermore, while the detector moves on the x-y plane and the z-axis through the detector moving device, the detector generates a plurality of the diffraction images with different positions on the x-y plane and the z-axis with respect to the inspection target, and thus simultaneously implements phase retrieval and super resolution of diffraction images."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Inspection apparatus and method based on coherent diffraction imaging (CDI)","description":"An inspection apparatus includes: a light source that generates and outputs light; a stage on which an inspection target is arranged; an irradiation optical system that irradiates light from the light","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11275034","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11275034","citation_suggestion":"Patentable. \"Inspection apparatus and method based on coherent diffraction imaging (CDI)\" (US-11275034). https://patentable.app/patents/US-11275034","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11275034","json":"https://patentable.app/api/llm-context/US-11275034","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T10:03:46.108Z"}