{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11280604","patent":{"patent_number":"US-11280604","title":"Film thickness measurement device, film thickness measurement method, film thickness measurement program, and recording medium for recording film thickness measurement program","assignee":null,"inventors":[],"filing_date":"2018-10-01T00:00:00.000Z","publication_date":"2022-03-22T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":17,"abstract":"A film thickness measurement device includes a light output unit that outputs measurement light, a spectroscopic detection unit that detects detection light, and an analysis unit that compares a measured reflectance for each wavelength of a measurement object with a theoretical reflectance and analyzes a film thickness of a first film and a film thickness of a second film. The analysis unit acquire candidates for optimal solutions of the film thicknesses using a result of comparison between the measured reflectance and the theoretical reflectance for each wavelength of the measurement object in a first wavelength range and determines the optimal solutions of the film thicknesses out of the candidates for the optimal solutions using a result of comparison between the measured reflectance and the theoretical reflectance for each wavelength of the measurement object in a second wavelength range."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Film thickness measurement device, film thickness measurement method, film thickness measurement program, and recording medium for recording film thickness measurement program","description":"A film thickness measurement device includes a light output unit that outputs measurement light, a spectroscopic detection unit that detects detection light, and an analysis unit that compares a measu","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11280604","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11280604","citation_suggestion":"Patentable. \"Film thickness measurement device, film thickness measurement method, film thickness measurement program, and recording medium for recording film thickness measurement program\" (US-11280604). https://patentable.app/patents/US-11280604","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11280604","json":"https://patentable.app/api/llm-context/US-11280604","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T13:41:45.935Z"}