{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11280717","patent":{"patent_number":"US-11280717","title":"Methods and apparatus for detection and analysis of nanoparticles from semiconductor chamber parts","assignee":null,"inventors":[],"filing_date":"2017-11-07T00:00:00.000Z","publication_date":"2022-03-22T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N","G01N","G01N","G01N","G01N","G01N","G01N","G01N"],"num_claims":17,"abstract":"Methods and apparatuses for identifying contaminants in a semiconductor cleaning solution, including: contacting a semiconductor cleaning solution with a semiconductor manufacturing component to form an effluent including one or more insoluble analytes-of-interest; contacting the effluent including one or more insoluble analytes-of-interest with an optical apparatus configured to sense fluorescence and, optionally, Raman signals from the one or more insoluble analytes-of-interest, wherein the apparatus includes an electron multiplying charged couple device and a grating spectrometer to spectrally disperse the fluorescence and project the fluorescence on to the electron multiplying charged couple device; and identifying the one or more analytes of interest."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Methods and apparatus for detection and analysis of nanoparticles from semiconductor chamber parts","description":"Methods and apparatuses for identifying contaminants in a semiconductor cleaning solution, including: contacting a semiconductor cleaning solution with a semiconductor manufacturing component to form ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11280717","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11280717","citation_suggestion":"Patentable. \"Methods and apparatus for detection and analysis of nanoparticles from semiconductor chamber parts\" (US-11280717). https://patentable.app/patents/US-11280717","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11280717","json":"https://patentable.app/api/llm-context/US-11280717","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T09:39:44.526Z"}