{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11280749","patent":{"patent_number":"US-11280749","title":"Holes tilt angle measurement using FIB diagonal cut","assignee":null,"inventors":[],"filing_date":"2020-10-23T00:00:00.000Z","publication_date":"2022-03-22T00:00:00.000Z","cpc_codes":["G01N","G01N","H01L","H01L","G01N","G01N","G01N","G01N"],"num_claims":20,"abstract":"A method of evaluating a region of a sample that includes a plurality of holes, wherein the method includes: taking a first image of the region by scanning the region with a first charged particle beam; evaluating the first image to determine a first center-to-center distance between first and second holes in the plurality of holes; milling a diagonal cut in an area within the region that includes the second hole at an angle such that an upper surface of the sample in the milled area where the second hole is located is recessed with respect to an upper surface of the sample where the first hole is located; thereafter, taking a second image of the region by scanning the region with the first charged particle beam; evaluating the second image to determine a second center-to-center distance between first and second holes in the plurality of holes; and comparing the second center-to-center distance to the first center-to-center distance."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Holes tilt angle measurement using FIB diagonal cut","description":"A method of evaluating a region of a sample that includes a plurality of holes, wherein the method includes: taking a first image of the region by scanning the region with a first charged particle bea","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11280749","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11280749","citation_suggestion":"Patentable. \"Holes tilt angle measurement using FIB diagonal cut\" (US-11280749). https://patentable.app/patents/US-11280749","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11280749","json":"https://patentable.app/api/llm-context/US-11280749","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T06:31:32.084Z"}