{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11280753","patent":{"patent_number":"US-11280753","title":"Sensors for detecting substitution between chemicals and methods of manufacturing a semiconductor device using the sensor","assignee":null,"inventors":[],"filing_date":"2020-02-04T00:00:00.000Z","publication_date":"2022-03-22T00:00:00.000Z","cpc_codes":["G01N","H01L","G01N","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"Sensors for detecting a substitution between chemicals may include an upper electrode and an electrical signal measurement circuit. A first chemical and a second chemical may be sequentially applied to the upper electrode. A triboelectrification may be generated between the upper electrode and the first and second chemicals to flow different electrical signals through the upper electrode. The electrical signal measurement circuit may measure the electrical signals to detect the substitution between the first and second chemicals. Thus, the second chemical may be applied to a semiconductor substrate from the substitution timing so that an original function of the second chemical may be maintained without a delay of the time for fabricating a semiconductor device."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Sensors for detecting substitution between chemicals and methods of manufacturing a semiconductor device using the sensor","description":"Sensors for detecting a substitution between chemicals may include an upper electrode and an electrical signal measurement circuit. A first chemical and a second chemical may be sequentially applied t","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11280753","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11280753","citation_suggestion":"Patentable. \"Sensors for detecting substitution between chemicals and methods of manufacturing a semiconductor device using the sensor\" (US-11280753). https://patentable.app/patents/US-11280753","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11280753","json":"https://patentable.app/api/llm-context/US-11280753","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T12:19:50.921Z"}