{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11281068","patent":{"patent_number":"US-11281068","title":"High-efficiency multi-slot waveguide nano-opto-electromechanical phase modulator","assignee":null,"inventors":[],"filing_date":"2020-11-24T00:00:00.000Z","publication_date":"2022-03-22T00:00:00.000Z","cpc_codes":["G02F","G02F","B82Y"],"num_claims":20,"abstract":"A nano-opto-electro-mechanical System (NOEMS) phase shifter is described. The NOEMS may include a multi-slot waveguide structure suspended in air. The multi-slot waveguide structure may include three or more waveguides separated from each other by slots. The width of the slots may be sufficiently small to support slot modes, where a substantial portion of the mode energy is within the slots. For example, the slots may have widths less than 200 nm or less than 100 nm. The multi-slot waveguide structure may be disposed in a trench formed though the upper cladding of a substrate. An undercut may be formed under the multi-slot waveguide structure to enable free motion of the structure. NOEMS phase modulators of the types described herein may be used in connection with photonic processing systems, telecom/datacom systems, analog systems, etc."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"High-efficiency multi-slot waveguide nano-opto-electromechanical phase modulator","description":"A nano-opto-electro-mechanical System (NOEMS) phase shifter is described. The NOEMS may include a multi-slot waveguide structure suspended in air. The multi-slot waveguide structure may include three ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11281068","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11281068","citation_suggestion":"Patentable. \"High-efficiency multi-slot waveguide nano-opto-electromechanical phase modulator\" (US-11281068). https://patentable.app/patents/US-11281068","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11281068","json":"https://patentable.app/api/llm-context/US-11281068","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T20:35:14.826Z"}