{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11282672","patent":{"patent_number":"US-11282672","title":"Charged particle beam apparatus and sample processing observation method","assignee":null,"inventors":[],"filing_date":"2019-09-17T00:00:00.000Z","publication_date":"2022-03-22T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N"],"num_claims":10,"abstract":"Disclosed are a charged particle beam apparatus and a sample processing observation method, the method including: a sample piece formation process in which a sample is irradiated with a focused ion beam such that a sample piece is cut out from the sample; a cross-section processing process in which the sample piece support holds the sample piece and a cross section thereof is irradiated with the ion beam to process the cross section; a sample piece approach movement process in which the sample piece support holds the sample piece and the sample piece is moved to a position that is closer to an electron beam column than an intersection point of beam optical axes of the ion beam and an electron beam is; and a SEM image acquisition process in which the cross section is irradiated with the electron beam to acquire the SEM image of the cross section."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Charged particle beam apparatus and sample processing observation method","description":"Disclosed are a charged particle beam apparatus and a sample processing observation method, the method including: a sample piece formation process in which a sample is irradiated with a focused ion be","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11282672","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11282672","citation_suggestion":"Patentable. \"Charged particle beam apparatus and sample processing observation method\" (US-11282672). https://patentable.app/patents/US-11282672","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11282672","json":"https://patentable.app/api/llm-context/US-11282672","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T19:13:47.657Z"}