{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11282698","patent":{"patent_number":"US-11282698","title":"Method of forming topology-controlled amorphous carbon polymer film","assignee":null,"inventors":[],"filing_date":"2020-07-15T00:00:00.000Z","publication_date":"2022-03-22T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":10,"abstract":"A method of forming a topology-controlled layer on a patterned recess of a substrate, includes: (i) depositing a Si-free C-containing film having filling capability on the patterned recess of the substrate by pulse plasma-assisted deposition to fill the recess in a bottom-up manner or bottomless manner; and (ii) subjecting the bottom-up or bottomless film filled in the recess to plasma aching to remove a top portion of the filled film in a manner leaving primarily or substantially only a bottom portion of the filled film or primarily or substantially only a sidewall portion of the filled film."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of forming topology-controlled amorphous carbon polymer film","description":"A method of forming a topology-controlled layer on a patterned recess of a substrate, includes: (i) depositing a Si-free C-containing film having filling capability on the patterned recess of the subs","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11282698","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11282698","citation_suggestion":"Patentable. \"Method of forming topology-controlled amorphous carbon polymer film\" (US-11282698). https://patentable.app/patents/US-11282698","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11282698","json":"https://patentable.app/api/llm-context/US-11282698","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T17:05:23.406Z"}