{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11282713","patent":{"patent_number":"US-11282713","title":"Semiconductor manufacturing apparatus and method of manufacturing semiconductor device","assignee":null,"inventors":[],"filing_date":"2021-02-11T00:00:00.000Z","publication_date":"2022-03-22T00:00:00.000Z","cpc_codes":["H01L","G05D","H01L","H01L","H01L","H01L","H01L"],"num_claims":13,"abstract":"In one embodiment, a method of manufacturing a semiconductor device includes forming a first film on a substrate. The method further includes etching the first film with first gas including carbon and fluorine to form a concave portion in the first film and form a second film in the concave portion. The method further includes treating the second film by using the second film to second gas or second liquid, wherein the second film is treated without plasma."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Semiconductor manufacturing apparatus and method of manufacturing semiconductor device","description":"In one embodiment, a method of manufacturing a semiconductor device includes forming a first film on a substrate. The method further includes etching the first film with first gas including carbon and","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11282713","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11282713","citation_suggestion":"Patentable. \"Semiconductor manufacturing apparatus and method of manufacturing semiconductor device\" (US-11282713). https://patentable.app/patents/US-11282713","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11282713","json":"https://patentable.app/api/llm-context/US-11282713","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T13:16:29.542Z"}