{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11282727","patent":{"patent_number":"US-11282727","title":"Control device of substrate processing apparatus and control method of substrate processing apparatus","assignee":null,"inventors":[],"filing_date":"2019-10-21T00:00:00.000Z","publication_date":"2022-03-22T00:00:00.000Z","cpc_codes":["H01L","H01L","G05B","H01L","H01L","H01L","H01L","G05B","G05B","G05B"],"num_claims":15,"abstract":"A control device of a substrate processing apparatus includes a reading unit, an estimation unit, a comparison unit, and a correction unit. The reading unit reads out a reference processing condition for processing a substrate. The estimation unit estimates an actual processing condition when the substrate is processed. The comparison unit compares the reference processing condition and the actual processing condition with each other. The correction unit corrects a processing condition for the substrate based on a comparison result in the comparison unit."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Control device of substrate processing apparatus and control method of substrate processing apparatus","description":"A control device of a substrate processing apparatus includes a reading unit, an estimation unit, a comparison unit, and a correction unit. The reading unit reads out a reference processing condition ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11282727","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11282727","citation_suggestion":"Patentable. \"Control device of substrate processing apparatus and control method of substrate processing apparatus\" (US-11282727). https://patentable.app/patents/US-11282727","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11282727","json":"https://patentable.app/api/llm-context/US-11282727","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T12:25:46.453Z"}