{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11286567","patent":{"patent_number":"US-11286567","title":"Glass and wafer inspection system and a method of use thereof","assignee":null,"inventors":[],"filing_date":"2021-07-15T00:00:00.000Z","publication_date":"2022-03-29T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G06T","G06T","G06T","G06T","H01L","H01L","H01L","H01L","H01L","G06T"],"num_claims":20,"abstract":"A method of inspection and an inspection system for the film deposition process for substrates that includes glass and wafer are disclosed. The inspection system includes multiple camera modules positioned in a load lock unit of a process chamber, such as the camera modules that can capture images of the substrate in the load lock. The images are analyzed by a control unit of the inspection system to determine the accuracy of robots in handling the substrate, calibration of the robots based on the analysis, and defects in the substrate caused during the handling and deposition process."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Glass and wafer inspection system and a method of use thereof","description":"A method of inspection and an inspection system for the film deposition process for substrates that includes glass and wafer are disclosed. The inspection system includes multiple camera modules posit","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11286567","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11286567","citation_suggestion":"Patentable. \"Glass and wafer inspection system and a method of use thereof\" (US-11286567). https://patentable.app/patents/US-11286567","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11286567","json":"https://patentable.app/api/llm-context/US-11286567","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T23:30:25.182Z"}