{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11289315","patent":{"patent_number":"US-11289315","title":"Sputter ion pump with penning-trap current sensor","assignee":null,"inventors":[],"filing_date":"2020-03-24T00:00:00.000Z","publication_date":"2022-03-29T00:00:00.000Z","cpc_codes":["G05B","G05B","G05B"],"num_claims":2,"abstract":"A sputter-ion-pump system includes a sputter ion pump and an electronic drive. The electronic drive supplies a voltage across the ion pump to establish, in cooperation with a magnetic field, a Penning trap within the ion pump. A current sensor measures the Penning-trap current across the Penning trap. The Penning trap is used as an indication of pressure within the ion pump or a vacuum chamber including or in fluid communication with the ion pump. The pressure information can be used to determine flow rates, e.g., due to a load, outgassing, and/or leakage from an ambient."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Sputter ion pump with penning-trap current sensor","description":"A sputter-ion-pump system includes a sputter ion pump and an electronic drive. The electronic drive supplies a voltage across the ion pump to establish, in cooperation with a magnetic field, a Penning","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11289315","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11289315","citation_suggestion":"Patentable. \"Sputter ion pump with penning-trap current sensor\" (US-11289315). https://patentable.app/patents/US-11289315","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11289315","json":"https://patentable.app/api/llm-context/US-11289315","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T08:27:54.287Z"}