{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11289530","patent":{"patent_number":"US-11289530","title":"Shallow trench isolation (STI) structure for CMOS image sensor","assignee":null,"inventors":[],"filing_date":"2020-01-21T00:00:00.000Z","publication_date":"2022-03-29T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":19,"abstract":"A shallow trench isolation (STI) structure and method of fabrication includes a two-step epitaxial growth process. A trench larger than the target STI structure is etched into a semiconductor substrate, a first layer of un-doped semiconductor material epitaxially grown in the trench to provide an STI structure having a target depth and a critical dimension, and a second layer of doped semiconductor material epitaxially grown on the first layer, said second layer filling the trench and forming a protrusion above the front-side of the semiconductor substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Shallow trench isolation (STI) structure for CMOS image sensor","description":"A shallow trench isolation (STI) structure and method of fabrication includes a two-step epitaxial growth process. A trench larger than the target STI structure is etched into a semiconductor substrat","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11289530","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11289530","citation_suggestion":"Patentable. \"Shallow trench isolation (STI) structure for CMOS image sensor\" (US-11289530). https://patentable.app/patents/US-11289530","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11289530","json":"https://patentable.app/api/llm-context/US-11289530","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T10:00:49.949Z"}