{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-11293871","patent":{"patent_number":"US-11293871","title":"Raman spectroscopy based measurement system","assignee":null,"inventors":[],"filing_date":"2018-05-15T00:00:00.000Z","publication_date":"2022-04-05T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N"],"num_claims":26,"abstract":"A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, and generating corresponding measured data indicative of a temperature dependence of the detected Raman scattering; and analyzing the measured data and generating data indicative of spatial profile of one or more properties of the patterned structure."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Raman spectroscopy based measurement system","description":"A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-11293871","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-11293871","citation_suggestion":"Patentable. \"Raman spectroscopy based measurement system\" (US-11293871). https://patentable.app/patents/US-11293871","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-11293871","json":"https://patentable.app/api/llm-context/US-11293871","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T10:33:27.203Z"}